Monitoring defects in III–V materials: A nanoscale CAFM study

V. Iglesias, Q. Wu, M. Porti, M. Nafria, G. Bersuker, A. Cordes, “Monitoring defects in III–V materials: A nanoscale CAFM study”, Microelectronic Engineering, Vol. 147 pp, 31–36 (2015)

DOI: 10.1016/j.mee.2015.04.058
Open access http://ddd.uab.cat/record/136896